Fig. 1 The lithography process. The projection lithography system. The advancement of semiconductor manufacturing is a key driver of electronic device innovations. As Moore’s Law progresses, ...
Two-photon polymerization (TPP) and direct laser writing (DLW) techniques utilise focused ultrashort laser pulses to induce highly localised photochemical reactions in photosensitive materials, ...
The research team proposed a method called aberration-converged annular lithography (ACAL) system, as schematic diagram shown in Figure 1. The Gaussian beam is converted into a collimated annular beam ...
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