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A variable-angle spectroscopic ellipsometer (VASE) is an essential tool for measuring the thickness of a thin film, as well as its n and k optical parameters. However, for films thinner than 10 nm, ...

Ellipsometry is a technique used to characterize optical properties and thicknesses of thin films by measuring the change in polarization state of light reflected from the surface of (or through) a ...

An optical instrument that uses the polarization state of reflected light to determine the thichness and optical constants of thin dielectric films. Used to characterize optical coatings.