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The Complete Guide to Understanding Control Charts: How They Work, and Which to Use

Identifying Variation When a process is stable and in control, it displays common cause variation, variation that is inherent ...
Semiconductor Engineering

Consideration Of Missing Defect Suppression Technique In EUV Hole Patterning

Optimizing CD variation and defect reduction comprehensively, to improve results of a wide defect process window with a narrow CD distribution. This study focused on the defect behavior analysis with ...
Semiconductor Engineering

Advanced Defect Inspection Techniques For nFET And pFET Defectivity At 7nm Gate Poly Removal Process

During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain ...
InfoQ

Using Blocker Clustering, Defect Clustering, and Prioritization for Process Improvement

Unlock the full InfoQ experience by logging in! Stay updated with your favorite authors and topics, engage with content, and download exclusive resources. Vivek Yadav, an engineering manager from ...
Houston Chronicle

The Importance of Variation in Manufacturing

Customer satisfaction determines customer loyalty, customer purchase intentions and in turn, a company's revenue stream. Product quality improves customer satisfaction. Reducing variation in both key ...
Design-Reuse

SOC: Submicron Issues -> Technique probes deep-submicron test

Peter Maxwell, Research and Development Specialist, Semiconductor Products Group, Agilent Technologies Inc., Santa Clara, Calif., Pete O'Neil, Senior Technology ...