AZOM

Laser Ablation for Site-Specific TEM Sample Preparation in a FIB-SEM

This article examines the use of femtosecond (fs) laser ablation for site-specific TEM sample preparation in a FIB-SEM. Various workflows are shown facilitating TEM lamella preparation of regions of ...
AZOM

Preventing Sample Surface Damage Through Plasma FIB-SEM Large Area Polishing

The key to understanding how a material will respond to specific conditions is a complete analysis of its properties. As well as the compositional and structural information offered by FIB-SEM and SEM ...
AZoNano

Improving SEM Sample Preparation With Broad Ion Beam Milling

Traditional methods, such as mechanical polishing and chemical etching, can introduce unwanted artifacts, surface damage, or thermal effects that compromise imaging accuracy and detail. That’s where ...
Semiconductor Engineering

Overview Of 103 Research Papers On Automatic SEM Image Analysis Algorithms For Semiconductor Defect Inspection (KU Leuven, Imec)

A new technical paper titled “Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review” was published by researchers at KU Leuven and imec.
AZoNano

Nanofluidic Devices for DNA Optical Mapping can be Fabricated and Characterized with FIB-SEM

Utilizing FIB-SEM, nanofluidic lab-on-a-chip devices for the analysis of single DNA molecules were characterized and fabricated. Direct FIB nanopatterning of silicon master stamps enables the quick ...
Nanowerk

Critical Dimension Scanning Electron Microscopy (CD-SEM): Precision Metrology for Nanoscale Fabrication

In the world of nanotechnology, where structures are measured in billionths of a meter, precise imaging and measurement techniques are essential. Critical Dimension Scanning Electron Microscopy ...