Business Wire

KLA-Tencor Introduces the EtchTemp SensorWafer™ for Next-Generation Wafer Temperature Measurement

MILPITAS, Calif.--(BUSINESS WIRE)--KLA-Tencor (NASDAQ: KLAC) today released its next-generation in-situ plasma etch wafer temperature measurement product, the EtchTemp SensorWafer™. The newest ...
AZoNano

Semiconductor Temperature Monitors - The kSA BandiT from k-Space Associates

Pyrometer reads high at low temperatures. kSA BandiT matches RHEED at GaAs oxide desorb. Spatially resolved GaN on sapphire temperature during rotation. Only kSA BandiT can directly measure GaN film ...
Optics

Ultraviolet pyrometer maps wafer temperature

GaN chip developers look set to benefit from an in situ pyrometer that can measure wafer temperatures with a precision of ±0.1°C. Richard Stevenson speaks to Thomas Zettler of optical sensor ...
AZOM

Thin Film Temperature Monitoring in Real Time with The kSA Gan BandiT from k-Space Associates

GaN-based LEDs and power electronics are currently a very active area for research, development, and production. While accurate and reproducible substrate temperature measurement is imperative for ...
CIOL

KLA-Tencor intros EtchTemp SensorWafer

MILPITAS, USA: KLA-Tencor released its next-generation in-situ plasma etch wafer temperature measurement product, the EtchTemp SensorWafer. This SensorWafer from KLA-Tencor’s SensArray division, ...
EDN

Unique Sensor Film Minimizes Defects and Improves Quality in Wafer Bonding

Madison, NJ (USA) – June 22, 2009 – Pressurex® film from Sensor Products Inc. is a quick, accurate and economical way to detect and correct pressure variations which can result in flaws (defects) in ...
AZOM

Rapid Thermal Processing in Semiconductor Manufacturing

RTP is a semiconductor manufacturing technique in which silicon wafers are heated at temperatures above 1000 o C using lasers or high-intensity lamps for a few seconds. During the cooling of the ...