Researchers have shown that a MEMS-based gas sensor manufactured with a desktop device performs at least as well as commercial sensors built at conventional production facilities. In the other paper, ...
Recently TDK released the InvenSense TCE-11101, a miniaturized ultra-low power MEMS gas sensor platform for direct and accurate detection of CO2. The device introduced new technology as part of the ...
Manufacturing microelectromechanical systems -- or MEMS -- has traditionally required sophisticated semiconductor fabrication facilities, which cost tens of millions of dollars to build. New studies ...
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